Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition

Published 2012 View Full Article

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Title
Crystal AlN deposited at low temperature by magnetic field enhanced plasma assisted atomic layer deposition
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 31, Issue 1, Pages 01A114
Publisher
American Vacuum Society
Online
2012-10-27
DOI
10.1116/1.4764112
References
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