Atomic layer deposition of titanium phosphate on silica nanoparticles

Title
Atomic layer deposition of titanium phosphate on silica nanoparticles
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 30, Issue 1, Pages 01A134
Publisher
American Vacuum Society
Online
2011-12-10
DOI
10.1116/1.3664097

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