Effects of vacuum ultraviolet radiation on deposited and ultraviolet-cured low-k porous organosilicate glass

Effect of vacuum ultraviolet and ultraviolet irradiation on mobile charges in the bandgap of low-k-porous organosilicate dielectrics

(2011) H. Sinha et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Surface potential due to charge accumulation during vacuum ultraviolet exposure for high-k and low-k dielectrics

(2010) H. Ren et al.   APPLIED PHYSICS LETTERS

Effect of vacuum ultraviolet and ultraviolet Irradiation on capacitance-voltage characteristics of low-k-porous organosilicate dielectrics

(2010) H. Sinha et al.   APPLIED PHYSICS LETTERS

Numerical simulation of vacuum-ultraviolet irradiation of dielectric layers

(2010) H. Sinha et al.   APPLIED PHYSICS LETTERS

Charge Trapping within UV and Vacuum UV Irradiated Low-k Porous Organosilicate Dielectrics

(2010) J. L. Lauer et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation

(2010) H. Sinha et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

Porous pSiCOH Ultralow-kDielectrics for Chip Interconnects Prepared by PECVD

(2009) Alfred Grill   Annual Review of Materials Research

Charge trapping at the low-k dielectric-silicon interface probed by the conductance and capacitance techniques

(2008) J. M. Atkin et al.   APPLIED PHYSICS LETTERS

Ultraviolet-Assisted Curing of Organosilicate Glass Low-k Dielectric by Excimer Lamps

(2008) Salvador Eslava et al.   JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Damage mechanism in low-dielectric (low-k) films during plasma processes

(2008) Butsurin Jinnai et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B