Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation

Published 2010 View Full Article

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Title
Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 6, Pages 1316-1318
Publisher
American Vacuum Society
Online
2010-09-24
DOI
10.1116/1.3488594

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