Transparent conductive Al-doped ZnO thin films grown at room temperature
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Title
Transparent conductive Al-doped ZnO thin films grown at room temperature
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 29, Issue 3, Pages 031505
Publisher
American Vacuum Society
Online
2011-03-17
DOI
10.1116/1.3565462
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