X-ray photoelectron spectroscopy study of polyimide thin films with Ar cluster ion depth profiling

Authors

Keywords

Journal

Volume 28, Issue 2, Pages L1-L4

Publisher

American Vacuum Society

Online

2010-03-12

DOI

10.1116/1.3336242

Discuss science. Find collaborators. Network.

Join a conversation

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started