X-ray photoelectron spectroscopy study of polyimide thin films with Ar cluster ion depth profiling

标题
X-ray photoelectron spectroscopy study of polyimide thin films with Ar cluster ion depth profiling
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 28, Issue 2, Pages L1-L4
出版商
American Vacuum Society
发表日期
2010-03-12
DOI
10.1116/1.3336242

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