Growth and characterization of TiAlN∕CrAlN superlattices prepared by reactive direct current magnetron sputtering

Published 2009 View Full Article

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Title
Growth and characterization of TiAlN∕CrAlN superlattices prepared by reactive direct current magnetron sputtering
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 27, Issue 1, Pages 29-36
Publisher
American Vacuum Society
Online
2009-01-08
DOI
10.1116/1.3013858

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