Growth and characterization of TiAlN∕CrAlN superlattices prepared by reactive direct current magnetron sputtering

标题
Growth and characterization of TiAlN∕CrAlN superlattices prepared by reactive direct current magnetron sputtering
作者
关键词
-
出版物
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 27, Issue 1, Pages 29-36
出版商
American Vacuum Society
发表日期
2009-01-08
DOI
10.1116/1.3013858

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