Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition

Published 2008 View Full Article

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Title
Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
Authors
Keywords
-
Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 26, Issue 5, Pages 1251-1257
Publisher
American Vacuum Society
Online
2008-09-13
DOI
10.1116/1.2966430

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