?The Degradation of Deposition Blocking Layer during Area Selective Plasma Enhanced Atomic Layer Deposition of Cobalt

出版年份 2010 全文链接

标题

作者

关键词

出版物

Volume 56, Issue 1, Pages 104-107

出版商

Korean Physical Society

发表日期

2010-01-18

DOI

10.3938/jkps.56.104

Discuss science. Find collaborators. Network.

Join a conversation

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started