Thermodynamic calculation for the chemical vapor deposition of silicon carbonitride

Published 2014 View Full Article

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Title
Thermodynamic calculation for the chemical vapor deposition of silicon carbonitride
Authors
Keywords
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Journal
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
Volume 34, Issue 15, Pages 3607-3618
Publisher
Elsevier BV
Online
2014-06-02
DOI
10.1016/j.jeurceramsoc.2014.05.023

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