Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications

Published 2014 View Full Article

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Title
Influence of carbon enrichment on electrical conductivity and processing of polycarbosilane derived ceramic for MEMS applications
Authors
Keywords
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Journal
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
Volume 34, Issue 15, Pages 3559-3570
Publisher
Elsevier BV
Online
2014-07-09
DOI
10.1016/j.jeurceramsoc.2014.06.002

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