Etched Surface Morphology of Heteroepitaxial Nonpolar (1120) and Semipolar (1122) GaN Films by Photoenhanced Chemical Wet Etching

Title
Etched Surface Morphology of Heteroepitaxial Nonpolar (1120) and Semipolar (1122) GaN Films by Photoenhanced Chemical Wet Etching
Authors
Keywords
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Journal
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 4, Pages D196
Publisher
The Electrochemical Society
Online
2011-02-23
DOI
10.1149/1.3544916

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