Etched Surface Morphology of Heteroepitaxial Nonpolar (1120) and Semipolar (1122) GaN Films by Photoenhanced Chemical Wet Etching

标题
Etched Surface Morphology of Heteroepitaxial Nonpolar (1120) and Semipolar (1122) GaN Films by Photoenhanced Chemical Wet Etching
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 158, Issue 4, Pages D196
出版商
The Electrochemical Society
发表日期
2011-02-23
DOI
10.1149/1.3544916

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