Process and Material Properties of HfLaO[sub x] Prepared by Atomic Layer Deposition

标题
Process and Material Properties of HfLaO[sub x] Prepared by Atomic Layer Deposition
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 10, Pages G189
出版商
The Electrochemical Society
发表日期
2008-09-06
DOI
10.1149/1.2960995

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