Growth of Highly Conformal TiCxFilms Using Atomic Layer Deposition Technique

Published 2013 View Full Article

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Title
Growth of Highly Conformal TiCxFilms Using Atomic Layer Deposition Technique
Authors
Keywords
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Journal
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
Volume 96, Issue 4, Pages 1060-1062
Publisher
Wiley
Online
2013-03-23
DOI
10.1111/jace.12289
References
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