Materials and fabrication sequences for water soluble silicon integrated circuits at the 90 nm node
Published 2015 View Full Article
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Title
Materials and fabrication sequences for water soluble silicon integrated circuits at the 90 nm node
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 106, Issue 1, Pages 014105
Publisher
AIP Publishing
Online
2015-01-08
DOI
10.1063/1.4905321
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