Materials and fabrication sequences for water soluble silicon integrated circuits at the 90 nm node

Title
Materials and fabrication sequences for water soluble silicon integrated circuits at the 90 nm node
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 106, Issue 1, Pages 014105
Publisher
AIP Publishing
Online
2015-01-08
DOI
10.1063/1.4905321

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