Materials and fabrication sequences for water soluble silicon integrated circuits at the 90 nm node
出版年份 2015 全文链接
标题
Materials and fabrication sequences for water soluble silicon integrated circuits at the 90 nm node
作者
关键词
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出版物
APPLIED PHYSICS LETTERS
Volume 106, Issue 1, Pages 014105
出版商
AIP Publishing
发表日期
2015-01-08
DOI
10.1063/1.4905321
参考文献
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