Etching of silicon surfaces using atmospheric plasma jets

Published 2015 View Full Article

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Title
Etching of silicon surfaces using atmospheric plasma jets
Authors
Keywords
-
Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 24, Issue 2, Pages 025002
Publisher
IOP Publishing
Online
2015-01-27
DOI
10.1088/0963-0252/24/2/025002

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