Etching of silicon surfaces using atmospheric plasma jets

标题
Etching of silicon surfaces using atmospheric plasma jets
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 24, Issue 2, Pages 025002
出版商
IOP Publishing
发表日期
2015-01-27
DOI
10.1088/0963-0252/24/2/025002

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