Thermal Plasma Sources: How Well are They Adopted to Process Needs?

Title
Thermal Plasma Sources: How Well are They Adopted to Process Needs?
Authors
Keywords
Thermal plasma processing, DC plasma torches (non-transferred), Radio frequency inductively coupled plasma torches
Journal
PLASMA CHEMISTRY AND PLASMA PROCESSING
Volume 35, Issue 3, Pages 421-436
Publisher
Springer Nature
Online
2015-02-25
DOI
10.1007/s11090-015-9616-y

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