Effect of radio frequency power and thickness on the electrochemical properties of Li2−x MnO3−y thin films
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Title
Effect of radio frequency power and thickness on the electrochemical properties of Li2−x MnO3−y thin films
Authors
Keywords
Li<sub>2−<em class=EmphasisTypeItalic >x</em></sub>MnO<sub>3−<em class=EmphasisTypeItalic >y</em></sub> thin films, Powder target, RF sputtering, RF power effect, XPS analysis, Electrochemical performance
Journal
JOURNAL OF SOLID STATE ELECTROCHEMISTRY
Volume 19, Issue 3, Pages 703-713
Publisher
Springer Nature
Online
2014-10-17
DOI
10.1007/s10008-014-2653-2
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