Sputter deposited LiPON thin films from powder target as electrolyte for thin film battery applications

Published 2011 View Full Article

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Title
Sputter deposited LiPON thin films from powder target as electrolyte for thin film battery applications
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 519, Issue 10, Pages 3401-3406
Publisher
Elsevier BV
Online
2011-01-20
DOI
10.1016/j.tsf.2011.01.087

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