Exploration of variables in the fabrication of pyrolysed photoresist

Title
Exploration of variables in the fabrication of pyrolysed photoresist
Authors
Keywords
-
Journal
JOURNAL OF SOLID STATE ELECTROCHEMISTRY
Volume 12, Issue 10, Pages 1357-1365
Publisher
Springer Nature
Online
2008-06-02
DOI
10.1007/s10008-008-0577-4

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