Raman studies on nanocomposite silicon carbonitride thin film deposited by r.f. magnetron sputtering at different substrate temperatures

标题
Raman studies on nanocomposite silicon carbonitride thin film deposited by r.f. magnetron sputtering at different substrate temperatures
作者
关键词
-
出版物
JOURNAL OF RAMAN SPECTROSCOPY
Volume 41, Issue 10, Pages 1234-1239
出版商
Wiley
发表日期
2010-01-19
DOI
10.1002/jrs.2588

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