An experimental study of photoresist material etching by an atmospheric-pressure plasma jet with Ar/air mixed gas

Title
An experimental study of photoresist material etching by an atmospheric-pressure plasma jet with Ar/air mixed gas
Authors
Keywords
-
Journal
JOURNAL OF PLASMA PHYSICS
Volume 79, Issue 05, Pages 683-689
Publisher
Cambridge University Press (CUP)
Online
2013-03-14
DOI
10.1017/s0022377813000263

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