Selective areain situconversion of Si (0 0 1) hydrophobic to hydrophilic surface by excimer laser irradiation in hydrogen peroxide

标题
Selective areain situconversion of Si (0 0 1) hydrophobic to hydrophilic surface by excimer laser irradiation in hydrogen peroxide
作者
关键词
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出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 47, Issue 38, Pages 385106
出版商
IOP Publishing
发表日期
2014-08-28
DOI
10.1088/0022-3727/47/38/385106

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