Impact of plasma treatment on electrical properties of TiO2/RuO2based DRAM capacitor

Published 2013 View Full Article

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Title
Impact of plasma treatment on electrical properties of TiO2/RuO2based DRAM capacitor
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 38, Pages 385304
Publisher
IOP Publishing
Online
2013-09-04
DOI
10.1088/0022-3727/46/38/385304

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