Epitaxial growth of 2 inch diameter homogeneous AlN single-crystalline films by pulsed laser deposition

Title
Epitaxial growth of 2 inch diameter homogeneous AlN single-crystalline films by pulsed laser deposition
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 10, Pages 105101
Publisher
IOP Publishing
Online
2013-02-12
DOI
10.1088/0022-3727/46/10/105101

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