Effect of structured electrodes on heating and plasma uniformity in capacitive discharges

Published 2013 View Full Article

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Title
Effect of structured electrodes on heating and plasma uniformity in capacitive discharges
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 50, Pages 505202
Publisher
IOP Publishing
Online
2013-11-27
DOI
10.1088/0022-3727/46/50/505202

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