Effect of structured electrodes on heating and plasma uniformity in capacitive discharges

标题
Effect of structured electrodes on heating and plasma uniformity in capacitive discharges
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 50, Pages 505202
出版商
IOP Publishing
发表日期
2013-11-27
DOI
10.1088/0022-3727/46/50/505202

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