Theoretical computation of thermophysical properties of high-temperature F2, CF4, C2F2, C2F4, C2F6, C3F6and C3F8plasmas

Published 2012 View Full Article

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Title
Theoretical computation of thermophysical properties of high-temperature F2, CF4, C2F2, C2F4, C2F6, C3F6and C3F8plasmas
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 28, Pages 285201
Publisher
IOP Publishing
Online
2012-06-23
DOI
10.1088/0022-3727/45/28/285201

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