Theoretical computation of thermophysical properties of high-temperature F2, CF4, C2F2, C2F4, C2F6, C3F6and C3F8plasmas

标题
Theoretical computation of thermophysical properties of high-temperature F2, CF4, C2F2, C2F4, C2F6, C3F6and C3F8plasmas
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 28, Pages 285201
出版商
IOP Publishing
发表日期
2012-06-23
DOI
10.1088/0022-3727/45/28/285201

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