Operation of a permanent-magnets- expanding plasma source connected to a large-volume diffusion chamber

Published 2010 View Full Article

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Title
Operation of a permanent-magnets- expanding plasma source connected to a large-volume diffusion chamber
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 44, Issue 1, Pages 015204
Publisher
IOP Publishing
Online
2010-12-10
DOI
10.1088/0022-3727/44/1/015204

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