The importance of an external circuit in a particle-in-cell/Monte Carlo collisions model for a direct current planar magnetron

Published 2008 View Full Article

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Title
The importance of an external circuit in a particle-in-cell/Monte Carlo collisions model for a direct current planar magnetron
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 1, Pages 013309
Publisher
AIP Publishing
Online
2008-01-15
DOI
10.1063/1.2828155

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