Deposition of amino-rich thin films by RF magnetron sputtering of nylon

Published 2009 View Full Article

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Title
Deposition of amino-rich thin films by RF magnetron sputtering of nylon
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 14, Pages 142001
Publisher
IOP Publishing
Online
2009-06-24
DOI
10.1088/0022-3727/42/14/142001
References
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