In Situ Diagnostics of RF Magnetron Sputtering of Nylon

Published 2009 View Full Article

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Title
In Situ Diagnostics of RF Magnetron Sputtering of Nylon
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 6, Issue S1, Pages S803-S807
Publisher
Wiley
Online
2009-05-06
DOI
10.1002/ppap.200932001

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