The electrical property of plasma-treated Ta/TaNx diffusion barrier

Published 2007 View Full Article

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Title
The electrical property of plasma-treated Ta/TaNx diffusion barrier
Authors
Keywords
-
Journal
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
Volume 69, Issue 2-3, Pages 601-604
Publisher
Elsevier BV
Online
2007-07-22
DOI
10.1016/j.jpcs.2007.07.048

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