The electrical property of plasma-treated Ta/TaNx diffusion barrier

标题
The electrical property of plasma-treated Ta/TaNx diffusion barrier
作者
关键词
-
出版物
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS
Volume 69, Issue 2-3, Pages 601-604
出版商
Elsevier BV
发表日期
2007-07-22
DOI
10.1016/j.jpcs.2007.07.048

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