Resolving Precursor Deligation, Surface Species Evolution, and Nanoparticle Nucleation during Palladium Atomic Layer Deposition

出版年份 2013 全文链接

标题

作者

关键词

出版物

Volume 117, Issue 21, Pages 11141-11148

出版商

American Chemical Society (ACS)

发表日期

2013-05-04

DOI

10.1021/jp401196f

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