Article
Chemistry, Physical
Hama Nadhom, Robert Boyd, Polla Rouf, Daniel Lundin, Henrik Pedersen
Summary: The newly developed CVD method allows for area selective deposition based on the electrical resistivity of the substrate surface, simplifying the fabrication of nanoscaled electronics. By adding a thin layer of silver on the SiO2 surface, iron films can be selectively deposited in low-resistivity areas, demonstrating the potential for using electric resistivity of the substrate surface in metal-on-metal deposition.
JOURNAL OF PHYSICAL CHEMISTRY LETTERS
(2021)
Article
Physics, Applied
Yong Chan Jung, Jin-Hyun Kim, Heber Hernandez-Arriaga, Jaidah Mohan, Su Min Hwang, Dan N. Le, Akshay Sahota, Harrison Sejoon Kim, Kihyun Kim, Rino Choi, Chang-Yong Nam, Daniel Alvarez, Jeffrey Spiegelman, Si Joon Kim, Jiyoung Kim
Summary: This study investigates the robust ferroelectric properties of low-temperature (350 ?) Hf0.5Zr0.5O2 (HZO) films. It is found that the use of anhydrous H2O2 oxidant enables the HZO films to fully crystallize at a lower temperature, with fewer defects. Additionally, this low-temperature crystallization process improves device reliability by suppressing electrode oxidation.
APPLIED PHYSICS LETTERS
(2022)
Review
Chemistry, Physical
Daniel Attila Karajz, Imre Miklos Szilagyi
Summary: This article reviews the possibilities of photocatalytically active ZnO nanomaterials synthesized using atomic layer deposition (ALD). ZnO, a widely researched photocatalytic material, is influenced by factors such as structure and morphology. The discussion includes the structural possibilities and the incorporation of other materials (such as elements, metals, or semiconductors) to form composite materials, such as ZnO/TiO2 heterostructures, polymer fibers, carbon nanomaterials (e.g. carbon nanotubes or graphene-oxide), and biomaterials.
SURFACES AND INTERFACES
(2023)
Review
Chemistry, Multidisciplinary
William Chiappim, Benedito Botan Neto, Michaela Shiotani, Julia Karnopp, Luan Goncalves, Joao Pedro Chaves, Argemiro da Silva Sobrinho, Joaquim Pratas Leitao, Mariana Fraga, Rodrigo Pessoa
Summary: The increasing demand for miniaturized devices has led to high importance and requirements for nanofabrication technologies that are of high-quality, low temperatures, and low cost. In recent years, the development of atomic layer deposition (ALD) processes has sparked interest in their use in advanced electronic and nano/microelectromechanical systems (NEMS/MEMS) device manufacturing. Non-thermal plasma (NTP) technology has emerged as a significant technique that expands the process window of ALD and allows the fabrication of various nanomaterials at lower temperatures, enabling the coverage of thermosensitive substrates with good formability and uniformity. This review article comprehensively describes the impact of NTP on the ALD universe and its applications in device fabrication. It also presents the integration of NTP and ALD technologies to form the plasma-assisted ALD (PA-ALD) technique, which has been successfully used in nanofabrication and surface modification. The advantages and limitations of this technique are discussed, along with the introduction of atomic layer etching (ALE) technique, another development of the NTP and ALD junction that has gained attention for plasma-assisted nanofabrication.
Article
Chemistry, Physical
Valtteri Lasonen, Anton Vihervaara, Georgi Popov, Eva Tois, Lars Mester, Mohammad Karimi, Yoana Ilarionova, Reza Jafari Jam, Jonas Sundqvist, Mikko Ritala
Summary: Area-selective etching (ASE) of polymers is a novel and simple self-aligned patterning technique with potential application in semiconductor device fabrication. The polymer film is selectively decomposed on top of catalytically active materials while staying intact on catalytically inactive materials, eliminating edge placement errors and defects. This study investigates the ASE of poly(methyl methacrylate) (PMMA) using various catalytic materials in different atmospheres. The feasibility of the entire patterning process is demonstrated on a 100 nanometer scale.
CHEMISTRY OF MATERIALS
(2023)
Article
Materials Science, Coatings & Films
Kartik Sondhi, Rahul Sharangpani, Ramy Nashed Bassely Said, Joyeeta Nag, Michael Gribelyuk, Senaka Kanakamedala, Raghuveer S. S. Makala
Summary: The adoption of new materials driven by trends in device miniaturization has contributed to significant advancements in semiconductor technology. Thin-film deposition and lithographic techniques are crucial for achieving further scaling of devices. Area selective deposition is a powerful technique that can eliminate the need for multiple lithography steps, making the process more efficient.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2022)
Article
Materials Science, Multidisciplinary
Ehud Almog, Amit Sharma, Yuanshen Qi, Jonathan Zimmerman, Eugen Rabkin
Summary: Nanolattices, composed of nanometer-sized building blocks, have unique properties and are a rapidly growing class of metamaterials. This study fabricated a core-shell polymer-platinum nanolattice using various fabrication techniques. The thickness of the platinum coating significantly affected the strength and load-bearing capacity of the lattice.
Article
Nanoscience & Nanotechnology
Jingwei Shi, Ajay Ravi, Nathaniel E. Richey, Huaxin Gong, Stacey F. Bent
Summary: The development of new resist materials is crucial for next-generation microelectronics fabrication techniques. Inorganic resists, such as hafnicone, show promise due to their higher etch resistance, resistance to pattern collapse, and ability to absorb extreme ultraviolet radiation. This study explores the patterning mechanism of hafnicone thin films deposited via molecular layer deposition, and demonstrates their potential in advanced e-beam and DUV lithographic techniques.
ACS APPLIED MATERIALS & INTERFACES
(2022)
Article
Chemistry, Multidisciplinary
Valerio Di Palma, Andrea Pianalto, Michele Perego, Graziella Tallarida, Davide Codegoni, Marco Fanciulli
Summary: In vitro and in vivo stimulation and recording of neuron action potential can be achieved using microelectrode arrays made of IrO2, a conductive oxide known for its biocompatibility and charge injection capabilities. This study presents the growth of nanocrystalline rutile IrO2 using a new plasma-assisted ALD process, and provides a comprehensive characterization of its morphological, structural, physical, chemical, and electrochemical properties. The results demonstrate that IrO2 grown by PA-ALD is an excellent material for neuroelectronic applications, with high charge injection capacity and double-layer capacitance.
Article
Multidisciplinary Sciences
Woo Young Kim, Bo Wook Seo, Sang Hoon Lee, Tae Gyung Lee, Sin Kwon, Won Seok Chang, Sang-Hoon Nam, Nicholas X. Fang, Seok Kim, Young Tae Cho
Summary: A challenge in making a flexible mold stamp using roll-to-roll nanoimprint lithography is to increase area while minimizing perceptible seams. A method that enables the fabrication of scalable, quasi-seamless functional surfaces without the use of alignment marks is proposed. This method is capable of fabricating scalable functional surfaces and imprint molds with quasi-seamless and alignment mark-free patterning.
NATURE COMMUNICATIONS
(2023)
Article
Chemistry, Multidisciplinary
Ling-Ying Shi, Ashwanth Subramanian, Lin Weng, Sangho Lee, Kim Kisslinger, Chang-Yong Nam, Caroline A. Ross
Summary: In this study, ZnO was selectively introduced into the organic microdomains through self-assembly, achieving the preparation of organic-inorganic hybrids. The results showed that ZnO can selectively form composites with liquid crystalline polymers, and the core-shell morphology of the composites was obtained through etching.
Article
Chemistry, Physical
Xiaowan Yuan, Daiqin Xiao, Wei Yao, Zhihao Zhang, Lin Yang, Liyuan Zhang, Yibo Zeng, Jiaqi Liao, Shanxiong Luo, Chonghao Li, Hong Chen, Xiangmeng Qu
Summary: In this study, a DNA origami-assisted nanolithography combined with area-selective atomic layer deposition strategy was used to fabricate custom-shaped hafnium oxide nanostructures. The selective growth of hafnium oxide on DNA origami substrates in hydroxyl-rich areas was observed. The area-selective ALD method, combined with the surface group difference between DNA origami and naked hexamethyldisilane (HMDS)-treated substrates, allowed for precise modeling of the shapes with high-precision. This work provides a general technology for nanofabrication strategy.
Article
Materials Science, Coatings & Films
Kamesh Mullapudi, Nishit M. Murari, Ryan H. Mansergh, Douglas A. Keszler, John F. Conley
Summary: This work demonstrates controlled area-selective deposition of aluminum oxide phosphate (AlPO) at room temperature and near atmospheric pressure using a potentially zero-waste aerosol jet fog (ajFOG) deposition system. The process involves coating Octyl-trichlorosilane (OTS-8) self-assembled monolayers (SAMs) on SiO2/Si substrates, forming hydrophobic and hydrophilic regions through ultraviolet/ozone exposure, and selectively depositing AlPO onto the hydrophilic regions. Smooth films with sharp boundaries are achieved, with investigation into features and defects as a function of various parameters.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
(2021)
Article
Chemistry, Physical
Tzu-Ling Liu, Stacey F. Bent
Summary: Area-selective atomic layer deposition (AS-ALD) is typically limited by the requirement of substrate materials with substantially different chemical properties. This study introduces a new process using self-assembled monolayers (SAMs) as inhibitors for achieving selective ALD on patterns with chemically similar materials. By utilizing differential reactivity of SAMs on various dielectric surfaces, the research demonstrates high selectivity for ZnO and Al2O3 ALD, opening up new possibilities for applications in next generation electronic devices.
CHEMISTRY OF MATERIALS
(2021)
Article
Chemistry, Multidisciplinary
Chengming Lou, Kai Wang, Houshan Mei, Jiayue Xie, Wei Zheng, Xianghong Liu, Jun Zhang
Summary: The study developed a simple and efficient TDD strategy for growing ZnO nanoarrays, which exhibited remarkable sensitivity and selectivity for NO2 detection, along with fast response and recovery times.
Article
Chemistry, Multidisciplinary
Xi Xu, Gangwen Fu, Yuxuan Wang, Qinghe Cao, Yanran Xun, Chen Li, Cao Guan, Wei Huang
Summary: A 3D-printed Ni electrode with a designed periodic structure and surface chemistry facilitates rapid bubble generation and emission, yielding a high electrochemically active surface area. By loading with MoNi4 and NiFe layered double hydroxide active materials, the electrode achieves high current densities for hydrogen and oxygen evolution reactions. An all-3D-printed alkaline electrolyzer exhibits stable performance for clean energy production over a long period of time.
Article
Multidisciplinary Sciences
Qinghe Cao, Yong Gao, Jie Pu, Xin Zhao, Yuxuan Wang, Jipeng Chen, Cao Guan
Summary: The authors propose a gradient design for zinc anodes that prevents side reactions and dendrite growth. This design allows for long-term stable zinc anodes at high currents/capacities, which is a significant challenge for practical rechargeable zinc-ion batteries.
NATURE COMMUNICATIONS
(2023)
Article
Chemistry, Multidisciplinary
Tao Zhang, Yipu Liu, Li Tong, Jie Yu, Shiwei Lin, Yue Li, Hong Jin Fan
Summary: An in situ approach is developed to modify the valence state of octahedral Ni cations in NiFe2O4 spinel oxides, using surface sulfates. This modification enhances the oxygen evolution reaction (OER) performance by promoting the electron occupancy of active sites to near-unity and optimizing the energy barrier of the potential-determining step. The co-modification strategy significantly enhances the electrocatalytic activity.
Article
Chemistry, Multidisciplinary
Jun Pan, Lulu Hu, Yuchen Zhang, Tao Zhang, Nana Wang, Shixue Dou, Hong Jin Fan
Summary: By co-engineering the internal structure and surface modification of the cathode, the development of polymer sodium batteries with stable interfaces is achieved, leading to improved cycling stability and specific capacity.
ADVANCED FUNCTIONAL MATERIALS
(2023)
Article
Chemistry, Multidisciplinary
Hang Yang, Tengsheng Zhang, Duo Chen, Yicheng Tan, Wanhai Zhou, Li Li, Wei Li, Guangshe Li, Wei Han, Hong Jin Fan, Dongliang Chao
Summary: In the literature, Zn-Mn aqueous batteries (ZMABs) exhibit abnormal capacity behavior and various charge/discharge behaviors due to electrolyte additive-induced complexes. However, the current performance assessment for ZMABs remains unregulated and lacks a comprehensive and impartial evaluation protocol. This hinders further research and commercialization. Therefore, a pH clue (proton-coupled reaction) is proposed to understand different mechanisms, and performance metrics including rated capacity (C-r) and electrolyte contribution ratio from Mn2+ (CfM) are discussed. Moreover, the relationship between Mn (II) <-> Mn (III) <-> Mn (IV) conversion chemistry and protons consumption/production is established, and the design concepts of a tunable H+/Zn2+/Mn2+ storage system for customized application scenarios are proposed, paving the way for the next-generation high-safety and reliable energy storage system.
ADVANCED MATERIALS
(2023)
Article
Chemistry, Multidisciplinary
Jun Pan, Yuchen Zhang, Fu Sun, Markus Osenberg, Andre Hilger, Ingo Manke, Ruiguo Cao, Shi Xue Dou, Hong Jin Fan
Summary: A solvated double-layer quasi-solid polymer electrolyte (SDL-QSPE) is designed to improve stability and Na+ conductivity in polymer-based sodium-ion batteries. The SDL-QSPE, laminated with cathode- and anode-facing polymer electrolyte, exhibits enhanced cycle performance and high Coulombic efficiency. The interfacial evolution is analyzed through theoretical calculations and 3D X-ray microtomography.
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
(2023)
Article
Chemistry, Multidisciplinary
Jin-Lin Yang, Peihua Yang, Da-Qian Cai, Zhe Wang, Hong Jin Fan
Summary: Atomically dispersed Ni-N4 and Fe-N4 dual sites coanchored on porous hollow carbon nanocages (Ni-Fe-NC) are fabricated and deployed as the sulfur host for Li-S battery, demonstrating high energy density, prolonged lifespan, and low polarization.
Article
Chemistry, Physical
Yumei Liu, Tiantian Wu, Hongfei Cheng, Jiawen Wu, Xiaodong Guo, Hong Jin Fan
Summary: Structural modulation of bismuth oxide nanosheet via Zn2+ cooperation enhances the electrocatalytic performance of CO2RR, resulting in superior selectivity towards formate generation.
Article
Biotechnology & Applied Microbiology
Matteo Beggiato, Hugo Payen, Christine Dupont-Gillain, Sivashankar Krishnamoorthy
Summary: This study shows that molecular tethers can immobilize receptors to the sensor surface and their length and flexibility greatly influence the efficiency of analyte capture. Despite different binding mechanisms, the influence of tether length and flexibility is similar for gold nanoparticles and neutravidin. Real-time quantitative measurements reveal that tether length and flexibility are decoupled from density and conformation. Substituting neutravidin with neutravidin-conjugated gold nanoparticles emphasizes the impact of tether length and increases analyte valency, highlighting the importance of considering tether structure in sensor interface design.
SENSORS AND ACTUATORS REPORTS
(2023)
Review
Chemistry, Multidisciplinary
Zeyu Geng, Ting Meng, Fei Ma, Wencheng Qin, Xiaohan Wang, Haifeng Zhang, Gao Guan
Summary: This review summarizes the recent progress in the application of dual-functional electrodes in LiS cells, covering the selection of host materials and design methods. The potential of different materials, such as carbon-based materials, single-atom catalysts, transition metal compounds, heterostructure hybrids, and polymers, as dual-functional electrodes is discussed. The design principles and prospects for future research and commercial application are proposed.
ADVANCED FUNCTIONAL MATERIALS
(2023)
Article
Chemistry, Physical
Jiayu Yang, Xi Xu, Yong Gao, Yuxuan Wang, Qinghe Cao, Jie Pu, Fan Bu, Ting Meng, Cao Guan
Summary: This study reports an ultra-stable zinc powder-based anode, constructed by coating a conformal ion-conductive hydrogel layer on 3D-printed zinc scaffolds. The interconnected hydrogel effectively redistributes the zinc ion flux and homogenizes the surface electric field, while the 3D architecture alleviates the stress from volume change at high current densities/capacities. As a result, the 3D zinc powder-based symmetric cell demonstrates stable performance for over 4700 hours (>6 months) at a high current density/capacity of 5 mA cm(-2)/5 mAh cm(-2), surpassing previously reported zinc powder-based anodes and bare zinc foil, offering a promising route for practical applications of low-cost and large-scale zinc-ion batteries.
ADVANCED ENERGY MATERIALS
(2023)
Article
Chemistry, Physical
Xin Zhao, Yong Gao, Qinghe Cao, Fan Bu, Jie Pu, Yuxuan Wang, Cao Guan
Summary: A free-standing Zn powder-based anode with gradient particle size and porosity is constructed for flexible Zn-ion batteries, which effectively suppresses dendrite growth and improves the cycle stability and lifespan of the battery.
ADVANCED ENERGY MATERIALS
(2023)
Article
Chemistry, Physical
Hongbo Zhang, Wen Wen, Bowen Du, Lei Zhou, Yu Chen, Shun Feng, Chenji Zou, Lishu Wu, Hong Jin Fan, Weibo Gao, Handong Sun, Jingzhi Shang, Ting Yu
Summary: All-inorganic cesium lead bromide (CsPbBr3) quantum dots (QDs) have been reported as ideal gain materials for high-performance lasers due to their high photoluminescence (PL) quantum efficiency. However, isolated CsPbBr3 QDs have not achieved lasing emission (LE) because of their finite absorption cross-section. In this study, continuous-wave lasing of isolated CsPbBr3 QDs embedded in a microcavity is demonstrated, achieving stable single-mode lasing emissions with an ultra-low threshold and a high Q factor. These perovskite-based microcavity structures provide an excellent experimental platform for studying single-particle nano-lasers and quantum physics frontiers.
NANOSCALE HORIZONS
(2023)
Article
Chemistry, Multidisciplinary
Hongxuan Tang, Jiujiu Ge, Lanze Li, Xinqiang Zhu, Sai Wu, Fan Wang, Yajun Pang, Zhehong Shen, Cao Guan, Hao Chen
Summary: This study proposes an efficient ultrasound-assisted one-step fabrication method for room-temperature CoNi double hydroxide (UA-CoNi DH) microspheres, which perform well as cathodes for Ni-Zn batteries. The UA-CoNi DH exhibits improved electrochemical properties compared to CoNi DH prepared without ultrasound assistance by increasing interlayer spacing and bulk conductivity while maintaining the structure features. The Ni-Zn battery with UA-CoNi DH as the cathode (UA-CoNi DH//Zn) shows a good specific capacity (202.36 mAh/g) and rate performance (70.49% capacity maintained at a 10-fold higher current), with more than 71.61% and 21.99% improvement relative to the CoNi DH//Zn battery, respectively. This work provides guidelines for constructing high-performance Ni-Zn battery cathodes in an open environment.
CHINESE CHEMICAL LETTERS
(2023)
Review
Chemistry, Multidisciplinary
Qinghe Cao, Yong Gao, Jie Pu, Abdelnaby M. Elshahawy, Cao Guan
Summary: In order to improve the stability of the Zn anode, optimizing the Zn deposition behavior is an efficient way to enhance subsequent striping efficiency and limit dendrite growth. The Zn deposition is a controlled kinetics-diffusion joint process that is affected by factors such as the interaction between Zn2+ ions and Zn anodes, ion concentration gradient, and current distribution. This review provides an electrochemical perspective on the factors affecting Zn deposition behavior, summarizes modification principles, and discusses strategies for interfacial modification and 3D structural design along with their corresponding mechanisms.