Influence of Al Doping on the Properties of ZnO Thin Films Grown by Atomic Layer Deposition

标题
Influence of Al Doping on the Properties of ZnO Thin Films Grown by Atomic Layer Deposition
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 115, Issue 25, Pages 12317-12321
出版商
American Chemical Society (ACS)
发表日期
2011-06-03
DOI
10.1021/jp2023567

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