Deposition Dynamics of Hydrogenated Silicon Clusters on a Crystalline Silicon Substrate under Typical Plasma Conditions†

Published 2010 View Full Article

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Title
Deposition Dynamics of Hydrogenated Silicon Clusters on a Crystalline Silicon Substrate under Typical Plasma Conditions†
Authors
Keywords
-
Journal
JOURNAL OF PHYSICAL CHEMISTRY A
Volume 114, Issue 9, Pages 3297-3305
Publisher
American Chemical Society (ACS)
Online
2010-01-20
DOI
10.1021/jp909446c

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