期刊
JOURNAL OF PHYSICAL CHEMISTRY A
卷 114, 期 9, 页码 3297-3305出版社
AMER CHEMICAL SOC
DOI: 10.1021/jp909446c
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资金
- GENCI-IDRIS [2009-0910642]
We have studied the deposition dynamics of hydrogenated silicon clusters on a silicon substrate for various cluster sizes and impact energies. The results show that the interaction processes of silicon nanocrystals with a crystalline silicon substrate strongly depend on the impact energy ranging from elastic scattering over soft-landing to cluster destruction with penetration of some cluster atoms into the substrate. Under certain conditions, epitaxial-like recrystallization of clusters has been observed after the initial cluster structure was completely lost upon surface impact. The reaction mechanisms as a function of impact energy are in good agreement with recent experimental results.
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