Spin-on silicon-nitride Films for Photo-lithography by RT Cure of Polysilazane

标题
Spin-on silicon-nitride Films for Photo-lithography by RT Cure of Polysilazane
作者
关键词
-
出版物
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
Volume 23, Issue 2, Pages 225-230
出版商
Technical Association of Photopolymers, Japan
发表日期
2010-08-05
DOI
10.2494/photopolymer.23.225

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