Deposition of Al doped ZnO thin films on the different substrates with radio frequency magnetron sputtering

Published 2012 View Full Article

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Title
Deposition of Al doped ZnO thin films on the different substrates with radio frequency magnetron sputtering
Authors
Keywords
-
Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 359, Issue -, Pages 69-72
Publisher
Elsevier BV
Online
2012-11-08
DOI
10.1016/j.jnoncrysol.2012.09.024

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