Deposition of Al doped ZnO thin films on the different substrates with radio frequency magnetron sputtering

标题
Deposition of Al doped ZnO thin films on the different substrates with radio frequency magnetron sputtering
作者
关键词
-
出版物
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 359, Issue -, Pages 69-72
出版商
Elsevier BV
发表日期
2012-11-08
DOI
10.1016/j.jnoncrysol.2012.09.024

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