Selection of post-growth treatment parameters for atomic layer deposition of structurally disordered TiO2 thin films

Published 2007 View Full Article

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Title
Selection of post-growth treatment parameters for atomic layer deposition of structurally disordered TiO2 thin films
Authors
Keywords
-
Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 354, Issue 2-9, Pages 404-408
Publisher
Elsevier BV
Online
2007-10-26
DOI
10.1016/j.jnoncrysol.2007.07.051

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