Lithium aluminosilicate glass-ceramic containing Na2O for low-temperature anodic bonding in microelectronic mechanical systems

Title
Lithium aluminosilicate glass-ceramic containing Na2O for low-temperature anodic bonding in microelectronic mechanical systems
Authors
Keywords
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Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 354, Issue 12-13, Pages 1407-1410
Publisher
Elsevier BV
Online
2007-12-01
DOI
10.1016/j.jnoncrysol.2007.02.093

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